Oxidation of Sintered Aluminum Nitride by Oxygen and Water Vapor

Aluminum Nitride Substrate Growth by Halide Vapor Transport Epitaxy

High-quality AlN layers with thickness up to 50 mm have been grown by HVTE at growth rates up to 60mm/h at deposition temperatures of 1000–11001C in the pressure range of 50–760Torr. The HVT process uses an aluminum chloride amine adduct as the aluminum source and ammonia for the nitrogen. This new technique eliminates the main difficulties of the conventional HVPE growth, where aluminum oxidat...

On the effect of water and oxygen in chemical vapor deposition of boron nitride

Deep Oxidation of Aluminum by a DC Oxygen Plasma

Resumen A novel way to obtain aluminum oxidation using a DC oxygen plasma is described. It is shown that the alumina layer is 50 nm thick and the oxidation results in a stochiometric formation of Al2O3. The influence on the oxidation of the electrode distance and pressure are studied. By analysing the experimental data, we find that the kinematics of oxide growth can be described as having two ...

Reduction of Surface hr~ >ion Caused by Helium Blistering in Sintered Beryllium and Sintered Aluminum Powder

Studies have been conducted to find Materials with microstructures which Minimize the formation of blisters. A promising class of materials appears to be sintered metal powder with small average grain sizes and low atomic number Z. Studies of the surface erosion of sintered aluminum powder (SAP 895) and of aluminum held at AOO'C due to blistering by 100 keV helium ions have been conducted and t...

Oxidation of a polycrystalline titanium surface by oxygen and water

Reactions of a well-characterized polycrystalline titanium surface with oxygen and water molecules at 150–850 K were studied in UHV by X-ray photoelectron spectroscopy ( XPS), thermal desorption spectroscopy (TDS) and Fourier transform reflectance–absorption infrared spectroscopy (FT-RAIRS). At 150 K, 2 oxidizes Ti0 to TiIV, TiIII and TiII, but Ti exposure to H2O at this temperature produces on...